Feature
・Excellent corrosion resistance at high temperature (400 ℃ or more)
・Hardness is twice that of CVD Yttria Coating
・Can be coated on three-dimensional objects
High temperature exposure test with corrosive gas（ClF3：Chlorine trifluoride）
Method
Test Condition
Heating temperature：600℃
Gas flow rate：100%ClF3 50sccm
Exposure time：10min
※Comparison example under test conditions
Quartz glass：＞35μm etching
Si：red-hot by reaction heat（1400～1800℃）
Results
Comparison
Hardness（Nano indenter）
Specification summary
Heating temperature ：５００℃
Maximum size：φ１５０mm x Height１５０mm
Material ：Quartz, Ceramics, Metal
Please contact us for details.